Vacuum pump system
US5733104A · kind A · utility
44Cited by
18References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 1995 |
| Grant date | Mar 31, 1998 |
| Priority date | — |
| Expiry date | Aug 17, 2015 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D25/00
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pump system for multi-stage gas inlet systems and including a pumping unit formed of a turbomolecular pump and one or several further pumps arranged downstream of the turbomolecular pump and the rotors of which are located on the same shaft as the rotor of the turbomolecular pump, and an additional intermittently operated dry running pump, which discharges against atmospheric pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.