Method for producing ceramic substrate
US5733499A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 1996 |
| Grant date | Mar 31, 1998 |
| Priority date | — |
| Expiry date | Jul 16, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A ceramic green sheet includes ceramic particles having a spherical diameter of 0.01-0.5 .mu.m of a primary particle as a ceramic component, an average degree of aggregation of 10 or less, wherein the ceramic green sheet contains at most 1 vol % of secondary particles having a diameter of 20 .mu.m or more and has a surface roughness (Ra) of 0.2 .mu.m or less. A method for producing a ceramic substrate having a thickness of 30 .mu.m or less includes the steps of: preparing a ceramic slurry by mixing a ceramic powder with an organic binder and at least one organic solvent, and adjusting a viscosity to be within the range of 100-10,000 mPa's; removing coarse aggregated particles from the ceramic slurry; molding the ceramic slurry into a ceramic green sheet by a reverse roll coater method; and firing the ceramic green sheet so that an average crystal grain size be 2 .mu.m or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.