Ceramic coatings synthesized by chemical reactions energized by laser plasmas
US5733609A · kind A · utility
Inventor
Key dates
| Filing date | Jun 1, 1993 |
| Grant date | Mar 31, 1998 |
| Priority date | — |
| Expiry date | Jun 1, 2013 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/48
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The methods for ceramic coatings synthesized by chemical reactions energized by laser plasmas were invented. Laser plasmas were generated by pulsed laser beams focused by a reflector having a hole. The ions and electrons were formed by the laser plasmas from gaseous molecules or solid materials. The first method applied an electric or a magnetic field to separate ions from electrons and to promote ion-atom and ion-molecule reactions. The product molecular ions were focused and deflected to coat patterned coatings with extremely high precision. The second method allowed the electron-ion recombinations to form product molecules or radicals to form high uniform coatings. These two methods and their combinations provides consistent, or continuous modulations, or discrete layers in vast varieties of chemical compositions and crystal structures. Ceramic films were separated by dissolving the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.