Zirconia diaphragm structure, method of producing the same, and piezoelectric/electrostrictive film element having the zirconia diaphragm structure
US5733670A · kind A · utility
9Cited by
5References
6Claims
0Family size
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Key dates
| Filing date | Sep 6, 1995 |
| Grant date | Mar 31, 1998 |
| Priority date | — |
| Expiry date | Sep 6, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2237/80
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A zirconia diaphragm structure, and a method of producing such structure. The zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-5.0% by weight of one of combinations consisting of (i) alumina and calcia, (ii) alumina, calcia and magnesia, (iii) alumina, calcia and silica, and (iv) alumina, calcia, magnesia and silica.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.