Inspection system and process
US5734742A · kind A · utility
138Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 15, 1995 |
| Grant date | Mar 31, 1998 |
| Priority date | — |
| Expiry date | Sep 15, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30156
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to reliably detect a defect on an inspected surface, electronic pictures of the inspected surface are formed at different positions by moving an imaging area relative to the inspected surface. Defect candidate regions are extracted from a series of the pictures. The system examines whether a movement from one candidate region to another candidate region is proportional to the movement of the imaging area. If the movement between the candidate regions is in proportion to the movement of the imaging area, the system judges that the candidate regions are imagery of a defect on the inspected surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.