Process and apparatus for producing a functional structure of a semiconductor component

US5736464A · kind A · utility

Assignee

• Deutsche Forschungsanstalt Fur Luft-Und Raumfahrt E.V. · DE

Inventor

• Hans Opower · Krailling, DE

Key dates

• Filing date: May 25, 1995
• Grant date: Apr 7, 1998
• Expiry date: May 25, 2015

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S148/093
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

In order to improve a process and an apparatus for producing a functional structure of a semiconductor component, which comprises layers arranged on a base substrate and defining the entire functions of the semiconductor component, such that the functional structure of the semiconductor components can be produced as simply as possible and with as little susceptibility as possible with respect to the quality of the semiconductor components it is suggested that all the layers be produced without lithography and applied to the base substrate one after the other exclusively with physical layer application processes.