Near-field optical microscope for angle resolved measurements
US5739527A · kind A · utility
42Cited by
4References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 1996 |
| Grant date | Apr 14, 1998 |
| Priority date | — |
| Expiry date | Apr 25, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/862
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a near-field optical microscope, in particular to a scanning near-field optical microscope (SNOM), comprising means for determining the intensity of light emerging from the near-field at a direction differing from the direction perpendicular to the surface of the sample to be examined, preferably emerging at an angle .theta. larger than the critical angle. The invention allows an accurate control of the distance between the probing tip of the SNOM and the sample by using the measured intensity in a feedback loop.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.