Patent · US Expired

IC test handler having a planet rotating mechanism for cooling or heating ICs

US5742158A · kind A · utility

4Cited by
5References
4Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJul 1, 1996
Grant dateApr 21, 1998
Priority date
Expiry dateJul 1, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/68778
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An IC test handler having an IC constant temperature chamber 7 includes M plant IC holders 71 each having K surfaces, a planet holder arranging mechanism 72 and an intermittent rotation driving mechanism 73. The holders 71 are arranged in an annular array on the mechanism 72 and revolve around the shaft for the sun. The mechanism 73 intermittently rotates in a step of 360.degree./M so that when each holder 71 makes one rotation around the shaft for the sun, the number of rotations of each holder on its own shaft is {N.+-.(1/K)}, where N is an integer. An IC which was attached to one of the K surfaces of a holder during one stop period in the intermittent rotation is removed from the holder during another stop period after the mechanism 73 has been rotated around the sun for a time sufficient for the IC to be preheated for the temperature test. Therefore, the number of preheated ICs in the IC constant temperature chamber can be increased, the test period can be shortened, the staying time for the preheating can be elongated and the space efficient in the chamber can be improved.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.