Corrosion resistant molybdenum mask
US5744214A · kind A · utility
11Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 1997 |
| Grant date | Apr 28, 1998 |
| Priority date | — |
| Expiry date | Jan 30, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24322
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A molybdenum mask for use in the sputter deposition of electrically conductive materials on preselected areas of a substrate is coated with a transition metal carbide. The carbide protects the metal images defined on the mask from degradation during mask cleaning and related processes, thereby dramatically extending the usable service life of the mask. The present invention overcomes the problem of reduced usable life of a molybdenum mask used in sputter coating and similar evaporative deposition processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.