Patent · US Expired

Device and method to measure the complex permeability of thin films at ultra-high frequencies

US5744972A · kind A · utility

5Cited by
7References
28Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 5, 1996
Grant dateApr 28, 1998
Priority date
Expiry dateApr 5, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R33/1223
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The device has a single strip having a first end, a second end, a length and a width. The first end of the strip is curved toward the second end of the strip to form a loop having a height. The length is approximately 10 mm, the width is approximately 5-8 mm, and the height is approximately 0.8-1.2 mm. The loop is preferably fabricated from copper. The loop is mounted directly to a test instrument such as a computer controlled impedance analyzer or network analyzer. The test instrument measures the inductance and resistance of the loop with no thin film sample placed therein, and then measures the inductance and resistance of the loop containing the sample under test. From these measurements, the device ultimately derives the permeability of the sample under test. The method for measuring the complex permeability of thin films at ultra-high frequencies includes the steps of recording the residual inductance and resistance for the loop empty; measuring the total inductance and resistance for the loop loaded with the sample under test; determining the change in resistance by subtracting the resistance of the loop without any sample from the resistance when the loop is loaded with the…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.