Robotic wafer handler
US5746565A · kind A · utility
72Cited by
49References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 22, 1996 |
| Grant date | May 5, 1998 |
| Priority date | — |
| Expiry date | Jan 22, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20323
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A robotic wafer handler has first and second arms pivotally connected at a swing point to operate in a plane. Each arm is independently drivable through greater than 360.degree. of rotation in the plane. The wafer handler may also include mechanisms for adjusting the plane of rotation, i.e., for providing lift and tilt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.