Vibratory microgyroscope
US5747690A · kind A · utility
45Cited by
3References
7Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 26, 1996 |
| Grant date | May 5, 1998 |
| Priority date | — |
| Expiry date | Dec 26, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5755
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microgyroscope includes a substrate, a vibratory structure having two stripe portions, a plurality of connection portions, and a comb, an elastic member for elastically maintaining the vibratory structure, a driver for applying the vibratory structure, a sensor for sensing the one directional action of the vibratory structure, and a plurality of sensing electrodes for sensing displacement by Coriolis force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.