Angular velocity sensor apparatus
US5747691A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1996 |
| Grant date | May 5, 1998 |
| Priority date | — |
| Expiry date | Mar 7, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5621
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A frame body and a tuning fork-shaped vibratory element are made of a single crystalline silicon substrate. The vibratory element has arms extending parallel to each other. The respective sides of the frame body are located face to face with a predetermined distance from the arms. Thin portions are formed between thick portions located partially on the arms of the vibratory element. Piezo-resistant elements for detecting angular velocity are disposed on the thin portions. When electrostatic force is imposed between the sides of the frame body and the arms, the arms are excited to vibrate. At this time, when angular velocity is imposed, the arms vibrate in the direction crossing at right angles with the excited direction. The piezo-resistant elements detect vibration of the arms caused by the angular velocity with stabilized characteristics and higher sensitivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.