Patent · US Expired

Automated non-visual method of locating periodically arranged sub-micron objects

US5747802A · kind A · utility

2Cited by

3References

20Claims

0Family size

Assignees

Siemens Aktiengesellschaft · DE
International Business Machines Corporation · US

Inventors

Norbert Arnold · Pfalzgrafenweiler, DE
Klaus Hummler · Apex, US
Ernest N. Levine · Poughkeepsie, US
Rainer Weiland · Flintsbach, DE

Key dates

Filing date	Mar 29, 1996
Grant date	May 5, 1998
Priority date	—
Expiry date	Mar 29, 2016

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/12
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method is disclosed for locating a particular small objects (down to submicron) within an array of periodically arranged like objects utilizing a scanning tool. The method includes scanning the array for generating a plurality of pulses, which correspond to these objects contained within the array. Counting the plurality of pulses in order to locate the particular object within the array.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.