Method of fabrication an optical waveguide
US5749132A · kind A · utility
14Cited by
28References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 16, 1996 |
| Grant date | May 12, 1998 |
| Priority date | — |
| Expiry date | Feb 16, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49982
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for diffusing titanium into a single-crystal lithium niobate substrate and guided wave devices produced therefrom provide improved mode match with coupled fibers. Preferably, the titanium diffusion occurs at a diffusion temperature for a time between about 8 hours and about 18 hours. Outdiffusion of lithium oxide is allowed to occur during titanium diffusion. The outdiffused region, typically at least about 25 .mu.m, is much deeper than the titanium diffusion depth, typically about 5-10 .mu.m.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.