Wafer suspension box
US5749467A · kind A · utility
19Cited by
15References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 4, 1996 |
| Grant date | May 12, 1998 |
| Priority date | — |
| Expiry date | Apr 4, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67369
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A ridged, transparent, thermoplastic package for transporting disk products such as substrate wafers, semi-conductor wafers or computer memory disks is disclosed. Elastomeric or flexible thermoplastic cushions hold the disk products in a manner which precludes them from becoming damaged during normal shipping and handling. The cushions have a plurality of disk engaging members which individually engage a disk. The disk engaging member conforms to the edge profile of the substrate wafer to securely hold the wafer. Wafer rotation is eliminated, particle generation is reduced and the cushions securely hold the disk products.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.