Capacitive pressure sensor with sensing element mechanically isolated from the casing

US5750899A · kind A · utility

Assignee

• ENVEC Mess- und Regeltechnik GmbH + Co. · DE

Inventors

• Frank Hegner · Bad Kötzting, DE
• Elke Schmidt · Bad Säckingen, DE
• Ulfert Drewes · Bad Hersfeld, DE
• Rainer Martin · Bochum, DE

Key dates

• Filing date: Sep 15, 1997
• Grant date: May 12, 1998
• Expiry date: Sep 15, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0075
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

To provide a flush-mounted and corrosion-resistant pressure sensor for measuring the pressure of a medium which, on the one hand, is very rugged and, on the other hand, has a casing (2) mechanically isolated from the sensing element (1) as perfectly as possible, and whose measured values exhibit little temperature dependence and little hysteresis, the casing (2) has an internal space (21) and is preferably pot-shaped for receiving the sensing element (1). An annular, particularly annular-disk-shaped, flexible connecting element (3), disposed between the casing (2) and the sensing element (1), and the sensing element close the interior space (21) toward the medium to be measured, and a liquid (4) fills the enclosed interior space (21).