Patent · US Expired

Cooling device of multi-chip module

US5751062A · kind A · utility

42Cited by
4References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 13, 1995
Grant dateMay 12, 1998
Priority date
Expiry dateDec 13, 2015

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/73253
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A cooling device of a multi-chip module has micropackages that are independent of thermal deformation and easy to assembly and disassembly. The multi-chip module includes a multi-layer substrate on which the micropackages, each encasing an LSI chip, are mounted, and a housing formed integrally with a cooler. Each of the micropackages includes a first heat conduction member, having a cap portion for receiving the LSI chip and a first fin made of the same material as the cap portion to be integral therewith, and a substrate fixed to the cap portion of the first heat conduction member, the LSI chip being mounted on the substrate which is securely fixed to the cap portion of the heat conduction member while being fixedly joined at the back surface thereof to an inner surface of the cap portion of the first heat conduction member. Second heat conduction members, each including a base portion and a second fin, are disposed to engage with the first fins and be pressed against the cooler by a spring, respectively.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.