Method and apparatus for an improved micromechanical modulator
US5751469A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 1, 1996 |
| Grant date | May 12, 1998 |
| Priority date | — |
| Expiry date | Feb 1, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An improved modulator and methods for making the modulator are disclosed. A membrane, preferably circular in shape, is formed over a region of a substrate in such a way that a gap results between the membrane and substrate forming a modulator cavity. The membrane forms a continuous surface over the cavity. In particular, the membrane is not supported by discrete support arms, but rather extends beyond the modulator cavity. Preferably, holes are formed in the membrane to aid in damping its motion and to allow access to underlying layers during modulator formation. According to the method, the modulator is formed by forming a means for creating a gap between the substrate and the membrane, forming a membrane, forming a lateral conduit to aid in removing the means for creating the gap and, finally, by removing the means for creating the gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.