Organic stripping composition
US5753601A · kind A · utility
21Cited by
24References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 27, 1997 |
| Grant date | May 19, 1998 |
| Priority date | — |
| Expiry date | Oct 27, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/14
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.