Microgyroscope with vibratory structure having a multitude of grooves
US5753817A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Dec 26, 1996 |
| Grant date | May 19, 1998 |
| Priority date | — |
| Expiry date | Dec 26, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5755
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microgyroscope includes a substrate, a first sensor where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel on the substrate, a driver arranged to be perpendicular to a stripe length direction of the first sensor on the substrate and where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel, a vibratory structure having a plurality of first grooves of a stripe shape vertically spaced from a plane of the first sensor and the driver at a predetermined height and formed in a direction congruous with a stripe length direction of first sensor and a plurality of second grooves of a stripe shape formed in a direction congruous with a stripe length direction of the driver, a support portion formed on the substrate for maintaining the vibratory structure from the substrate at a predetermined height, and elastic members for elastically connecting the vibratory structure and the support portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.