Fluid pressure sensing unit incorporating diaphragm deflection sensing array
US5753820A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 1996 |
| Grant date | May 19, 1998 |
| Priority date | — |
| Expiry date | Oct 25, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensing unit includes a re-usable portion which is isolated from system fluids and a disposable portion. The disposable portion includes an enclosure that defines an internal cavity with one wall of the enclosure being constituted by a flexible diaphragm that is exposed to operating pressure of the system. The re-usable portion has mounted therein a sensing array at a position adjacent to a non-system pressure side surface of the diaphragm. The sensing array includes a plurality of sensing elements which are arranged as radial inner and outer sets with each set being adapted to preferentially sense a deflection of a central portion of the diaphragm. An output signal representative of the fluid pressure in the fluid system is established based on a ratio of deflection signals from the sets of sensing elements. Preferably, the sensing elements constitute capacitive plates that have equally exposed surface areas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.