Patent · US Expired

Microelectronics package

US5753972A · kind A · utility

16Cited by
26References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 14, 1996
Grant dateMay 19, 1998
Priority date
Expiry dateMay 14, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3011
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A microelectronic package suitable for high-frequency microelectronic devices includes a base which is at least partially conductive attached to an RF substrate with a cavity formed at its center and a pattern of conductive paths for providing interconnection from the inside to the outside of the package. The base may be metal or ceramic with a metal layer deposited thereon. A sealing cap is attached to the RF substrate by a non-conductive adhesive, such as a polymer adhesive or low temperature seal glass, to seal the package once the microelectronic device has been mounted inside.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.