Patent · US Expired

Ink jet recording head with pressure chambers arranged along a 112 lattice orientation in a single-crystal silicon substrate

US5754205A · kind A · utility

68Cited by
3References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 19, 1996
Grant dateMay 19, 1998
Priority date
Expiry dateApr 19, 2016

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/42
  • WIPO fieldTextile and paper machines
  • WIPO sectorMechanical engineering

Abstract

In an ink jet head having: a nozzle plate in which a plurality of nozzle openings are formed; a flow path substrate comprising a reservoir to which ink is externally supplied, and a plurality of pressure chambers which are connected to the reservoir via an ink supply port and which respectively communicate with the nozzle openings; an elastic film which pressurizes ink in the pressure chambers; and driving means located at a position opposing the respective pressure chambers for causing the elastic film to conduct flexural deformation, the pressure chambers are arranged in a single-crystal silicon substrate of a (110) lattice plane and along a <112> lattice orientation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.