Enclosed sealable purgible semiconductor wafer holder
US5755332A · kind A · utility
32Cited by
54References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 11, 1996 |
| Grant date | May 26, 1998 |
| Priority date | — |
| Expiry date | Sep 11, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/138
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An enclosed semiconductor wafer holder, and a cover providing isolation control of semiconductor wafers that is simple, lower cost, and non-obtrusive is described. The cover includes a sealing perimeter that creates a hermetic seal when engaged with the semiconductor wafer holder. The holder also includes a purging arrangement attached to the holder that allows an active gentle purging of inert gas into the sealed semiconductor wafer holder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.