Patent · US Expired

Method for making submicrometer transition metal carbonitrides

US5756410A · kind A · utility

12Cited by
20References
29Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 27, 1997
Grant dateMay 26, 1998
Priority date
Expiry dateFeb 27, 2017

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC01P2004/64
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

A submicrometer transition metal carbonitride is produced having the formula: EQU M.sub.a M'.sub.b M".sub.(1-a-b) (C.sub.1-x) N.sub.x).sub.z wherein M is Ti, Zr or Hf; M' is V, Nb or Ta; M" is Cr, Mo or W; a ranges from 0 to 1; b ranges from 0 to 1 with the proviso that (a +b) is less than or equal to 1; x ranges from about 0.02 to about 0.95 and z ranges from about 0.9 to about 2. The transition metal carbonitride is produced by mixing (a) a transition metal oxide source of a transition metal in the above formula and (b) a carbon source such as carbon black. This mixture is heated at a rate of between about 100K/sec to about 100,000,000K/sec in a nitrogen containing non-oxidizing gas such as nitrogen or nitrogen mixed with argon to an elevated temperature that makes carbothermal reduction of the transition metal oxide source thermodynamically favorable for a residence time sufficient to convert the transition metal oxide source into at least one product selected from the group consisting of (i) a transition metal carbonitride and (ii) a transition metal carbonitride precursor. The product may be exposed to a finishing step involving heating the product to a temperature less than t…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.