Mechanism for changing a probe balance beam in a scanning probe microscope
US5756887A · kind A · utility
9Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1997 |
| Grant date | May 26, 1998 |
| Priority date | — |
| Expiry date | Feb 27, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/86
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope equipped with a mechanism for exchanging a probe balance beam from the scan head, wherein the probe balance beam is of the type which is magnetically constrained on the scan head. A magnet having a magnetic field strength greater than that of the scan head magnet is utilized to overcome the attractive force exerted on the balance beam by the scan head magnet and transfer the balance beam from the scan head to a plate in a holding station on the sample table of the microscope. Completely automatic operation is achieved without operator handling of the balance beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.