Height stage for positioning apparatus
US5757159A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 10, 1996 |
| Grant date | May 26, 1998 |
| Priority date | — |
| Expiry date | Oct 10, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T82/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An actuator providing Z-direction movement within a positioning system extends between an input stage and an output stage. A nut is mounted to rotate on the input stage in threaded engagement with a screw extending into the nut from the output stage. The nut is driven by a motor also mounted on the input stage. A plate attached to the output stage through a flexible leaf spring slides along the input stage in the Z-direction with movement of the output stage, preventing rotation of the output stage about the axis of the screw. Lateral positioning of the screw results from the threaded engagement of the screw and nut. The leaf spring is formed to provide a lateral pre-load force between the screw and nut.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.