Compensated pressure transducer
US5757608A · kind A · utility
39Cited by
16References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 1997 |
| Grant date | May 26, 1998 |
| Priority date | — |
| Expiry date | Jan 23, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The capacitance type pressure transducer is disclosed which includes an isolation additional diaphragm made of the same material as the operative diaphragms the transducer. Material may be quartz, silicon, or aluminosilicate. The isolation diaphragm minimizes deflections of the operative diaphragms as the housing base is bowed due to the pressure differential between the internal reference pressure of the capsule and the ambient pressure. The transducer may be configured to measure an absolute pressure or a differential pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.