Process for producing microstructure components on a substrate

US5759616A · kind A · utility

Assignee

• Kernforschungszentrum Karlsruhe GmbH · DE

Inventors

• Andreas Michel · Blankenloch, DE
• Michael Harmening · Hirschberg, DE
• Walter Bacher · Blankenloch, DE
• Peter Bley · Blankenloch, DE
• Robert Ruprecht · Walzbachtal, DE
• Alexander Both · Karlsruhe, DE

Key dates

• Filing date: Mar 10, 1995
• Grant date: Jun 2, 1998
• Expiry date: Mar 10, 2015

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/0735
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

In a process for producing microstructure components on a substrate which carries electronic microcircuits cooperating functionally with the microstructure components, a first layer of a plastic material which connects with the substrate is applied to the substrate and a second layer of a plastic material which includes a separating agent but which firmly connects with the first layer is applied to the first layer and a molding tool is then impressed into the second layer to form the desired microstructures or to form cavities into the plastic material, which, upon removal of the molding tool, are filled with a metal to form the desired microstructures on the substrate upon removal of the plastic material.