Patent · US Expired

Method for producing a high adhesion thin film of diamond on a Fe-based substrate

US5759623A · kind A · utility

11Cited by
46References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 14, 1995
Grant dateJun 2, 1998
Priority date
Expiry dateSep 14, 2015

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23C26/00
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A method for depositing a thin film of diamond on the surface of a Fe-based substrate comprises the step of pre-treating the surface of the Fe-based substrate prior to the deposition consisting of nucleating carbon atoms on the Fe-based substrate to grow the thin film of diamond. The pre-treatment consists of supersaturating the surface of the Fe-based substrate with carbon atoms and heating it to form a diffusion barrier layer. During the pre-treatment, at least a portion of the carbon atoms are diffused into the Fe-based substrate. During the deposition process, carbon atoms are prevented by the diffusion barrier layer previously formed to diffuse into the Fe-based substrate whereby these carbon atoms remain available for the nucleation and growth of the thin film of diamond. A portion of the carbon atoms diffused into the Fe-based substrate during the pre-treatment are nucleated during the deposition process and act as anchors to provide a high adhesion between the thin film of diamond and the surface of the Fe-based substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.