Method of making a surface micro-machined silicon pressure sensor
US5759870A · kind A · utility
19Cited by
36References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 28, 1995 |
| Grant date | Jun 2, 1998 |
| Priority date | — |
| Expiry date | Aug 28, 2015 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/0136
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods for surface micro-machining silicon wafers, including coating cavity sidewalls with oxidation-resistant material to prevent lateral oxidation. This in turn prevents "bird's beak" during formation of a diaphragm. The methods are useful for, among other things, the manufacture of absolute-type pressure sensors. Along with bulk micro-machining techniques, the methods can be used to produce gauge- and differential-type pressure sensors, as well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.