Scanning probe microscope
US5760300A · kind A · utility
19Cited by
10References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 29, 1997 |
| Grant date | Jun 2, 1998 |
| Priority date | — |
| Expiry date | Apr 29, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/875
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probing apparatus having an elastic body supported by a support and provided with a probe at its free end. The elastic body is disposed in a solution in which a sample is held. The elastic body is forcibly oscillated at its natural frequency by a driving source. A displacement detecting device detects a variation in the oscillation state of the elastic body which takes place when the tip of the probe is placed in the vicinity of the surface of the sample. The detected output from the displacement detecting device is fed to a sample data monitor device to provide a topographic image thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.