Thin film forming apparatus using laser and magnetic field
US5760366A · kind A · utility
32Cited by
18References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 7, 1996 |
| Grant date | Jun 2, 1998 |
| Priority date | — |
| Expiry date | Aug 7, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/732
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thin film forming apparatus using a laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting a laser beam to target 5, and a substrate holder (3). When the target is irradiated with a laser beam, a plume (15) is generated, and materials included in plume 15 are deposited on the surface of a substrate (2) held by the substrate holder (3). A magnetic field is generated to direct the plume. The magnetic field can be parallel to the surface of the substrate or in another embodiment a cusp magnetic field can be used (see FIG. 130).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.