XY table using a linear electromagnetic actuator
US5760500A · kind A · utility
52Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 1997 |
| Grant date | Jun 2, 1998 |
| Priority date | — |
| Expiry date | Mar 18, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20207
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An XY table that uses linear electromagnetic actuators to achieve faster operating speeds, improve durability, prevent generation of dust and reduce size (make more compact). The cord for supplying electrical power to the linear electromagnetic actuators and the cords for obtaining signals from each type of sensor are concentrated at an intermediate movement member (X table), and gathered together into a single cord that is used for connection to the outside (controller, etc.). As a result, detrimental effects caused by the cord are minimized which enables the XY table to demonstrate the performance described above.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.