Method of detecting coma of projection optical system
US5760879A · kind A · utility
19Cited by
7References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 5, 1995 |
| Grant date | Jun 2, 1998 |
| Priority date | — |
| Expiry date | Jul 5, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of detecting coma of a projection optical system includes receiving an image of a pattern projected by the projection optical system, at at least one position along an optical axis of the projection optical system, detecting a position of at least one received pattern image, with respect to a plane perpendicular to the optical axis of the projection optical system, and determining coma of the projection optical system on the basis of the detection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.