Flow sensor having first and second temperature detecting portions for accurate measuring of a flow rate and a manufacturing method thereof
US5763775A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Mar 12, 1997 |
| Grant date | Jun 9, 1998 |
| Priority date | — |
| Expiry date | Mar 12, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow sensor eliminates turbulence of fluid flow due to a structure of the temperature detecting portion so that a temperature of the temperature detecting portions does not fluctuate due to the turbulence of the fluid. The flow sensor is formed on a substrate. Each of a first temperature detecting portion and a second temperature detecting portion has a heating function and a temperature detecting function, and are arranged along a direction of flow of the fluid. A supporting portion is formed on the substrate for supporting the first and second temperature detecting portions thereon. The supporting portion does not have a side surface facing substantially in the direction of flow of the fluid. A side surface of the supporting portion is protected by a guard portion formed along the side surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.