Flow sensor
US5765432A · kind A · utility
7Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 8, 1996 |
| Grant date | Jun 16, 1998 |
| Priority date | — |
| Expiry date | Nov 8, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow sensor has a diaphragm and a resistive film positioned on the diaphragm. A heater is formed from the resistive film and temperature sensors are arranged on both sides of the heater. On both sides of the heater are additional temperature sensors, which are interconnected by an interconnect resistor and formed from the resistive film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.