Method for preventing micromechanical structures from adhering to another object
US5766367A · kind A · utility
37Cited by
5References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 1996 |
| Grant date | Jun 16, 1998 |
| Priority date | — |
| Expiry date | May 14, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/117
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.