Selective removal of vertical portions of a film
US5767017A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1995 |
| Grant date | Jun 16, 1998 |
| Priority date | — |
| Expiry date | Dec 21, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A body is provided with a substantially horizontal surface and a substantially vertical surface. A film is formed on the body with a substantially horizontal portion on the substantially horizontal surface, a substantially vertical portion on the substantially vertical surface, and a corner region joining the substantially horizontal and substantially vertical portions. The corner region and the substantially vertical portion of the film are removed while the body and the substantially horizontal portion of the film are left substantially intact. A high density plasma with a fluorocarbon-based etching gas may be used to remove the vertical portion and corner region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.