Patent · US Expired

Ferroelectric semiconductor device having a layered ferroelectric structure

US5767543A · kind A · utility

37Cited by
17References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 16, 1996
Grant dateJun 16, 1998
Priority date
Expiry dateSep 16, 2016

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/02271
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A layered bismuth ferroelectric structure (12) and a method for forming the bismuth layered ferroelectric structure (12). A monolayer (12A) of bismuth is formed in intimate contact with a single crystalline semiconductor material (11). A layered ferroelectric material (12) is grown on the monolayer (12A) of bismuth such that the monolayer (12A) of bismuth becomes a part of the layered ferroelectric material (12). The ferroelectric material (12) forms a layered ferroelectric material which is not a pure perovskite, wherein the crystalline structure at the interface between the single crystalline semiconductor material (11) and the monolayer (12A) of bismuth are substantially the same.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.