Inspection system and device manufacturing method using the same
US5767962A · kind A · utility
98Cited by
6References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 25, 1996 |
| Grant date | Jun 16, 1998 |
| Priority date | — |
| Expiry date | Nov 25, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/94
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection system includes a light source, a scanning device for scanning a surface to be inspected, with light from the light source, wherein the scanning device includes an optical member disposed with inclination with respect to a primary scan direction, the optical member being adapted to provide a convergent light being converged to form a spot at a distance changeable with the position of a scan, and a light receiving device for receiving scattered light from the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.