Actuator array and method for the manufacture thereof
US5768008A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 12, 1996 |
| Grant date | Jun 16, 1998 |
| Priority date | — |
| Expiry date | Jul 12, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An array of M.times.N electrodisplacive actuators is prepared by: PA1 (1) forming a multilayered ceramic structure having M layers of a first conductive metallization and M+1 layers of an electrodisplacive material; PA1 (2) obtaining a composite ceramic wafer by slicing the multilayered ceramic structure in a direction normal to the layers of the first conductive metallization; PA1 (3) providing a plurality of regularly spaced horizontally directional trenches running parallel to each other wherein each of the trenches is located at an equidistance from two adjacent layers of the first conductive metallization; PA1 (4) depositing a second conductive metallization; PA1 (5) preparing N-1 regularly spaced vertically directional cuts on the composite ceramic wafer prepared using steps (3) and (4) to thereby obtain the array of M.times.N electrodisplacive actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.