Fluid control apparatus
US5769110A · kind A · utility
54Cited by
3References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1996 |
| Grant date | Jun 23, 1998 |
| Priority date | — |
| Expiry date | Jun 28, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.