Method for making monolithically integrated signal processing circuit having active and passive components
US5770472A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 1996 |
| Grant date | Jun 23, 1998 |
| Priority date | — |
| Expiry date | Sep 9, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/1215
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical signal processor is implemented as a monolithically integrated semiconductor structure having optical waveguide devices forming beam splitters, optical amplifiers and optical phase shifters. The monolithic structure photonically controls a phased-array microwave antenna. Phase-locked master and slave lasers generate orthogonal light beams having a difference frequency that corresponds to the microwave carrier frequency of the phased-array antenna. The lasers feed the signal processor, which performs beam splitting, optical amplifying and phase shifting functions. A polarizer and an array of diode detectors convert optical output signals from the signal processor into microwave signals that feed the phased-array antenna. The optical waveguides of the signal processor are fabricated in a single selective epitaxial growth step on a semiconductor substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.