Patent · US Expired

Arrangement for testing a gate oxide

US5770947A · kind A · utility

6Cited by
5References
6Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 27, 1996
Grant dateJun 23, 1998
Priority date
Expiry dateMar 27, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2884
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A circuit arrangement has an integrated monocrystaline semiconductor power component having a gate, a first measuring pad, a second measuring pad, and a resistor arranged so that the gate of the power component is connected with the first measuring pad while the first measuring pad is connected with the resistor, the first measuring pad being charged with a gate test voltage which is greater than a gate voltage required for operation of the power component, the power component being integrated with an integrated circuit on a chip, the integrated circuit being connected with the second measuring pad, while the second measuring pad is connected with the resistor, the second measuring pad being charged with an external voltage which is compatible with the integrated circuit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.