Ultrafine particles and production method thereof
US5772754A · kind A · utility
10Cited by
3References
10Claims
0Family size
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Key dates
| Filing date | Feb 7, 1996 |
| Grant date | Jun 30, 1998 |
| Priority date | — |
| Expiry date | Feb 7, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/64
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An electron beam of more than 1.times.10.sup.19 e/cm.sup.2 .multidot.sec is irradiated to metastable metal oxide particles such as .theta.-Al.sub.2 O.sub.3 particles or the like disposed on an amorphous carbon film. A phase transformation or the like of the metastable metal oxide particles is occurred by the electron beam irradiation. Thus, stable metal oxide ultrafine particles such as an .alpha.-Al.sub.2 O.sub.3 ultrafine particle 2 whose diameter is more tiny than the metastable metal oxide particles used, and a metal ultrafine particle composed of an oxide such as Al ultrafine particles are produced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.