System for evaluating thin film coatings
US5772861A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 16, 1995 |
| Grant date | Jun 30, 1998 |
| Priority date | — |
| Expiry date | Oct 16, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/547
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system for evaluating the reflectance of an object (e.g., a CRT) that is coated with an anti-reflective coating material is disclosed. The quality and/or uniformity of the coating is evaluated by a reflectometer. The reflectometer is positioned relative to the object by non-contact sensors. Reflectance data gathered by the reflectometer is analyzed to determine to what extent the actual coating differs from the optimal (i.e., ideal) coating. A feedback system modifies the coating process for subsequent objects in an attempt to fine-tune the coating process and achieve optimal anti-reflective coatings for later objects passing through the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.