Anti-reflective coating composition
US5772925A · kind A · utility
11Cited by
7References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 10, 1997 |
| Grant date | Jun 30, 1998 |
| Priority date | — |
| Expiry date | Jul 10, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B1/111
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
An anti-reflective coating composition comprising a polyimide dissolved in an organic solvent is used to form an anti-reflective coating beneath a chemical amplification type resist layer. The composition allows a fine resist pattern to be formed with high accuracy in a convenient, efficient, reproducible manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.