Coating chamber planetary gear mirror rotating system
US5776256A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 1996 |
| Grant date | Jul 7, 1998 |
| Priority date | — |
| Expiry date | Oct 1, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/505
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A optical surface is mounted on a mirror rotating system having a carousel therein having gears which rotates said optical surface in a circular path while the optical surface itself rotates about an axis. The radius between the mirror support and the planetary gear is adjustable. The system is mounted on support legs within the vacuum chamber so that the optical surface can face downward when the apparatus is placed in a bell jar (or any such environment which provides a vacuum). A source of vaporized substance is placed under the apparatus, so that the optical surface, facing downward, is facing said source. This arrangement allows for an improvement in the uniformity of the substance deposited on the optical surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.